ThermoChuck® System
ThermoChucks are conductive heating and cooling systems for wafer testing at temperature. Its primary use is for wafer testing in probe stations, as well as laser trim and wafer burn-in. A few specialised applications include low leakage probing (fA level) and high voltage probing (up to 10kV).
• -65°C to +300°C extended temperature range with a low noise, DC control system.
• Up to five temperatures and amp/soak/cycle thermal cycling sets can be programmed at the front panel.
• IEEE-488 and RS232 included.
• Self-contained system requires no LN2 or LCO2 for cooling.
• Highly efficient cooling systems for reliable, low temperature testing of hybrids and other high power devices.
